Yang Jiaping
Data Storage Institute, A*STAR, 5 Engineering Drive 1, Singapore 117608, Republic of Singapore.
J Nanosci Nanotechnol. 2007 Jan;7(1):181-92.
This paper reviews the recent developments in the area of MEMS-based probe recording technology. Various state-of-the-art scanning probe microscope (SPM) based techniques are briefly introduced, followed by the description of system approaches of MEMS-based probe recording technology and the basic MEMS-based actuation mechanism. Subsequently, current research status in developing MEMS-based probe recording technology with emphasis on storage architecture, MEMS access systems, probe recording mechanisms, and media for terabit per square inch recording density, is reviewed. Lastly, potential research topics and prospects for MEMS-based probe recording technology development are discussed.
本文综述了基于微机电系统（MEMS）的探针记录技术领域的最新进展。简要介绍了各种基于先进扫描探针显微镜（SPM）的技术，随后描述了基于MEMS的探针记录技术的系统方法以及基本的基于MEMS的驱动机制。接着，综述了当前在开发基于MEMS的探针记录技术方面的研究现状，重点关注存储架构、MEMS访问系统、探针记录机制以及用于每平方英寸太比特记录密度的介质。最后，讨论了基于MEMS的探针记录技术发展的潜在研究课题和前景。
