Kadono H, Takai N, Asakura T
Appl Opt. 1987 Mar 1;26(5):898-904. doi: 10.1364/AO.26.000898.
A new type of phase shifting interferometer with a common-path arrangement using a polarization technique is proposed and discussed. In the interferometer, the dc (specular) component of an object beam is separated in the Fourier transform plane and used as a reference beam for its ac component. The phase of the dc component used as the reference beam is shifted by using a polarization technique for phase shifting interferometry. The present interferometer is different from a shearing type in that the phase distribution of an object beam is directly analyzed from the acquired intensity variations obtained by a 2-D detector such as a TV camera. Some experiments were conducted to verify the validity of the present phase shifting interferometer. They showed that high stability of the phase measurements is achieved up to lambda/200 with an accuracy of lambda/40 for wavelength lambda light. The interferometer is suitable for obtaining 2-D phase information about the surface structure of small objects.
提出并讨论了一种采用偏振技术的共光路新型相移干涉仪。在该干涉仪中，物光束的直流（镜面反射）分量在傅里叶变换平面中被分离出来，并用作其交流分量的参考光束。用作参考光束的直流分量的相位通过用于相移干涉测量的偏振技术进行相移。本干涉仪与剪切型干涉仪不同，在于物光束的相位分布是直接从由二维探测器（如电视摄像机）获取的强度变化中分析得到的。进行了一些实验以验证本相移干涉仪的有效性。实验表明，对于波长为λ的光，相位测量的稳定性高达λ/200，精度为λ/40。该干涉仪适用于获取关于小物体表面结构的二维相位信息。
