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基于一对立方分束器的用于显微镜的并行两步相移点衍射干涉测量法。

Parallel two-step phase-shifting point-diffraction interferometry for microscopy based on a pair of cube beamsplitters.

作者信息

Gao Peng, Yao Baoli, Min Junwei, Guo Rongli, Zheng Juanjuan, Ye Tong, Harder Irina, Nercissian Vanusch, Mantel Klaus

机构信息

State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences, Xi'an 710119, China.

出版信息

Opt Express. 2011 Jan 31;19(3):1930-5. doi: 10.1364/OE.19.001930.

DOI:10.1364/OE.19.001930
PMID:21369008
Abstract

Parallel two-step phase-shifting point-diffraction interferometry for microscopy based on a pair of cube beamsplitters is proposed. The first 45°-tilted cube beamsplitter splits object wave into two parallel copies: one copy is filtered by a pinhole in its Fourier plane to behave as reference wave, while the other one remains unchanged as object wave. The second cube beamsplitter combines the object and reference waves, and then split them together into two beams. Along with the two beams, two parallel phase-shifting interferograms are obtained in aid of polarization elements. Based on the proposed configuration, slightly-off-axis interferometry for microscopy is performed, which suppresses dc term by subtracting the two phase-shifting holograms from each other. The setup is highly stable due to its common-path configuration, and has been demonstrated to be suitable for measuring moving objects or dynamic processes.

摘要

提出了一种基于一对立方分束器的用于显微镜的并行两步相移点衍射干涉术。第一个45°倾斜的立方分束器将物波分成两个平行副本:一个副本在其傅里叶平面中由针孔滤波以作为参考波,而另一个副本作为物波保持不变。第二个立方分束器组合物波和参考波,然后将它们一起分成两束光。借助偏振元件,沿着这两束光获得两个平行的相移干涉图。基于所提出的配置,进行了用于显微镜的微偏轴干涉测量,通过将两个相移全息图相互相减来抑制直流项。由于其共路配置,该装置非常稳定,并且已被证明适用于测量运动物体或动态过程。

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