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反射光学表面上微米级矩形铝线的偏振光散射矩阵元素。

Polarized light scattering matrix elements for micron-sized rectangular aluminum lines on reflecting optical surfaces.

作者信息

Lafelice V J, Bickel W S

出版信息

Appl Opt. 1987 May 1;26(9):1799-805. doi: 10.1364/AO.26.001799.

DOI:10.1364/AO.26.001799
PMID:20454407
Abstract

The entire sixteen-element Mueller scattering matrix has been experimentally determined for several small rectangular cross-sectioned aluminum lines whose known dimensions are of the order of the incident light (wavelength lambda = 4416 A). Each line was fabricated on top of a smooth reflecting aluminum surface using electron beam lithography techniques. The Mueller matrix of the surface plus the line was measured as a function of the increasing size (height and width) of the line for various angles of illumination alpha. The results are compared to scattering and diffraction data from a single slit and opaque circular cylinder of equal dimensions.

摘要

对于几条已知尺寸与入射光波长(波长λ = 4416 Å)相当的小矩形横截面铝线,已通过实验确定了完整的十六元素穆勒散射矩阵。每条线都是使用电子束光刻技术在光滑的反射铝表面上制作的。测量了表面加线的穆勒矩阵,作为线的尺寸(高度和宽度)增加以及不同照明角度α的函数。将结果与来自尺寸相等的单缝和不透明圆柱体的散射和衍射数据进行了比较。

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