使用面积探测器阵列进行非球面镜测试。
Aspherical mirror testing with an area detector array.
作者信息
Ono A
出版信息
Appl Opt. 1987 May 15;26(10):1998-2004. doi: 10.1364/AO.26.001998.
PMID:20454434
Abstract
A deep aspherical surface testing method using an interferometer and an area array sensor is presented. The method is based on a fringe-scanning phase-detecting method. The method has high accuracy and does not require an aspherical reference surface, a null lens, or a hologram. After calculating the object-wavefront phase, a computer displays the sag difference map between a measured surface and an ideal aspherical surface. Results for testing an f/3 200-mm diam parabolic mirror are presented.
摘要
提出了一种使用干涉仪和面积阵列传感器的深非球面表面测试方法。该方法基于条纹扫描相位检测方法。该方法具有高精度，并且不需要非球面参考表面、无像差点透镜或全息图。计算出物波前相位后，计算机显示被测表面与理想非球面表面之间的矢高差图。给出了对直径200毫米、f/3抛物面镜的测试结果。
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