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基于组合计算全息图的斐索干涉仪进行非球面测试。

Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram.

作者信息

Asfour Jean-Michel, Poleshchuk Alexander G

机构信息

Dioptic GmbH, Kriemhildstrasse 11, 69469 Weinheim, Germany.

出版信息

J Opt Soc Am A Opt Image Sci Vis. 2006 Jan;23(1):172-8. doi: 10.1364/josaa.23.000172.

Abstract

Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new (to our knowledge) optical test method, in which the Fizeau principle is now perfectly fulfilled by generating reference and measuring wavefront on the last optical surface, which carries a diffractive optical element. This method has been examined experimentally by testing a reference f/0.68 spherical mirror and can be applied identically for testing aspheres. Several advantages of this method are discussed and proved experimentally.

摘要

带有附加衍射光学元件的斐索干涉仪常用于测量球面和非球面。我们提出了一种新的(据我们所知)光学测试方法,在该方法中,通过在承载衍射光学元件的最后一个光学表面上生成参考波前和测量波前,斐索原理现在得到了完美实现。通过测试一个参考f/0.68球面镜对该方法进行了实验验证,并且该方法可同样应用于非球面测试。文中讨论了该方法的几个优点并通过实验进行了验证。

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