Boef A J
Appl Opt. 1987 Nov 1;26(21):4545-50. doi: 10.1364/AO.26.004545.
A method for interferometrically measuring distances to rough surfaces with submillimeter resolution is described. The measuring range can be made as large as hundreds of millimeters. Owing to the inherent light sensitivity of the method described, the rangefinder can be used for 3-D profile measurements on a wide variety of objects even in poor measuring conditions.
描述了一种用于以亚毫米分辨率干涉测量到粗糙表面距离的方法。测量范围可达数百毫米。由于所述方法固有的光灵敏度，即使在恶劣的测量条件下，该测距仪也可用于对各种物体进行三维轮廓测量。
