Caber P J
Appl Opt. 1993 Jul 1;32(19):3438-41. doi: 10.1364/AO.32.003438.
Conventional interferometric methods of surface profiling are limited in the magnitude of surface height that can be accurately measured because of phase ambiguity errors on steep local slopes. Other optical methods that have been developed for surface profiling frequency suffer from poor height resolution and low measurement speed for three-dimensional profiles. Contact profilometers such as stylus-based instruments suffer from slow measurement speed, especially when three-dimensional profiles of the surface are required. Stylus tips can also scratch delicate surfaces duringthe course ofthe measurement. A new method of optical, noncontact profiling of rough surfaces is described that utilizes interferometric techniques as well as digital signal-processing algorithms to produce fast, accurate, and repeatable three-dimensional surface profile measurements.
传统的表面轮廓干涉测量方法，由于在陡峭局部斜坡上存在相位模糊误差，在可精确测量的表面高度大小方面受到限制。为表面轮廓频率开发的其他光学方法，对于三维轮廓而言，高度分辨率较差且测量速度较低。诸如基于触针的仪器等接触式轮廓仪测量速度慢，尤其是在需要表面的三维轮廓时。在测量过程中，触针尖端也会划伤易碎表面。本文描述了一种用于粗糙表面光学非接触轮廓测量的新方法，该方法利用干涉测量技术以及数字信号处理算法来进行快速、准确且可重复的三维表面轮廓测量。
