Haruna M, Yoshida S, Toda H, Nishihara H
Appl Opt. 1987 Nov 1;26(21):4587-92. doi: 10.1364/AO.26.004587.
A computer-controlled laser-beam writing system has been developed for optical integrated circuits (optical ICs). This system allows us to make waveguide patterns 3-4 microm wide, such as directional couplers, and Yjunction, crossed, and S-shaped waveguides, automatically within an edge roughness of 0.2 microm on a photoresist-coated LiNbO(3) substrate. By combining these waveguide patterns, optical ICs can be delineated over more than 50-mm length. This paper presents the system description and the laser-beam writing characteristics of key waveguide patterns. The integrated-optic fiber laser Doppler velocimeter is also demonstrated as an example of large-area optical ICs.
一种用于光学集成电路（光学IC）的计算机控制激光束写入系统已被开发出来。该系统使我们能够在涂有光刻胶的LiNbO(3)衬底上，自动制作宽度为3-4微米的波导图案，如定向耦合器、Y形结、交叉和S形波导，边缘粗糙度在0.2微米以内。通过组合这些波导图案，可以在超过50毫米的长度上描绘出光学IC。本文介绍了该系统的描述以及关键波导图案的激光束写入特性。还展示了集成光纤激光多普勒测速仪作为大面积光学IC的一个例子。
