开发用于大面积表面处理的非分散真空紫外光束线。
Developing an undispersed VUV beamline for large area surface processing.
作者信息
Janes J, Lutz N
出版信息
Appl Opt. 1989 Aug 15;28(16):3327-32. doi: 10.1364/AO.28.003327.
A versatile windowless beamline for undispersed VUV radiation in the energy range between 10 eV and 100 eV is presented. An adjustable light guiding assembly with two glass capillary arrays as vacuum interfaces is constructed to assure high optical transmission (~30%) of white synchrotron light. Three differential pumping stages reduce the pressure of a reaction gas from 1 mbar to 5 x 10(-9) mbar. Estimate of the optical transmission of the system are given. The beamline was designed to irradiate a large area of a semiconductor surface for synchroton photon enhanced etching and deposition processes.
介绍了一种用于10电子伏特至100电子伏特能量范围内非色散真空紫外辐射的通用无窗光束线。构建了一个带有两个玻璃毛细管阵列作为真空界面的可调光导组件，以确保白色同步加速器光的高光学传输率（约30%）。三个差动抽气阶段将反应气体的压力从1毫巴降低到5×10⁻⁹毫巴。给出了该系统光学传输率的估算值。该光束线设计用于辐照大面积半导体表面，以进行同步加速器光子增强蚀刻和沉积工艺。
Zotero 插件