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通过电子束光刻技术制造聚焦光栅镜。

Fabrication of a focusing grating mirror by electron beam lithography.

作者信息

Hori Y, Sogawa F, Asakure H, Kato M, Serizawa H

出版信息

Appl Opt. 1990 Jun 10;29(17):2522-6. doi: 10.1364/AO.29.002522.

DOI:10.1364/AO.29.002522
PMID:20567287
Abstract

A focusing grating mirror (FGM), which is a new computer generated holographic grating with functions of focusing lens and diffraction grating mirror, is proposed and fabricated, we believe, for the first time. A high speed and accurate electron beam writing system, based on a multitask minicomputer, 16-bit D/A converters with 64K-word static memories, and a scanning electron beam microscope, is developed and used to fabricate the FGMs comprising grating corrugations with chirp and bend structures. Excellent properties of the FGM are obtained, giving almost diffraction-limited spot size and the expected wavelength dispersion. The fabricated FGM is combined with a laser diode as an external cavity mirror to confirm the functions of direct optical feedback and wavelength selection, and the fundamental operation of an external-cavity laser is demonstrated.

摘要

本文首次提出并制作了一种聚焦光栅镜(FGM),它是一种具有聚焦透镜和衍射光栅镜功能的新型计算全息光栅。基于多任务小型计算机、带有64K字静态存储器的16位D/A转换器以及扫描电子束显微镜,开发了一种高速且精确的电子束写入系统,并用于制作具有啁啾和弯曲结构的光栅波纹的FGM。获得了FGM的优异性能,其光斑尺寸几乎达到衍射极限,并具有预期的波长色散。将制作好的FGM与激光二极管组合作为外腔镜,以确认直接光反馈和波长选择的功能,并演示了外腔激光器的基本运行。

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