The materials challenge in diffraction-unlimited direct-laser-writing optical lithography.
作者信息
Fischer Joachim, von Freymann Georg, Wegener Martin
机构信息
Institut für Angewandte Physik and DFG-Center for Functional, Nanostructures, Karlsruhe Institute of Technology, Wolfgang-Gaede-Strasse 1, D-76131 Karlsruhe, Germany. joachim.fi
出版信息
Adv Mater. 2010 Aug 24;22(32):3578-82. doi: 10.1002/adma.201000892.
PMID:20593434
Abstract
摘要
Zotero 插件