采用匹配光栅技术的双波长双外差干涉测量法。
Two-wavelength double heterodyne interferometry using a matched grating technique.
作者信息
Sodnik Z, Fischer E, Ittner T, Tiziani H J
出版信息
Appl Opt. 1991 Aug 1;30(22):3139-44. doi: 10.1364/AO.30.003139.
PMID:20706366
Abstract
Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.
摘要
双波长双外差干涉测量法用于对光学粗糙目标表面进行形貌测量。采用双波长氦氖激光器和匹配光栅技术来提高系统稳定性并简化外差频率的产生。
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