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硅纳米线的简易热解合成

Facile Pyrolytic Synthesis of Silicon Nanowires.

作者信息

Chan Joo C, Tran Hoang, Pattison James W, Rananavare Shankar B

机构信息

Advanced Logic Components, Ronler Acres, Intel, Hillsboro, OR 97123.

出版信息

Solid State Electron. 2010 Oct 1;54(10):1185-1191. doi: 10.1016/j.sse.2010.05.011.

DOI:10.1016/j.sse.2010.05.011
PMID:20711489
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC2919782/
Abstract

One-dimensional nanostructures such as silicon nanowires (SiNW) are attractive candidates for low power density electronic and optoelectronic devices including sensors. A new simple method for SiNW bulk synthesis[1, 2] is demonstrated in this work, which is inexpensive and uses low toxicity materials, thereby offering a safe, energy efficient and green approach. The method uses low flammability liquid phenylsilanes, offering a safer avenue for SiNW growth compared with using silane gas. A novel, duo-chamber glass vessel is used to create a low-pressure environment where SiNWs are grown through vapor-liquid-solid mechanism using gold nanoparticles as a catalyst. The catalyst decomposes silicon precursor vapors of diphenylsilane and triphenylsilane and precipitates single crystal SiNWs, which appear to grow parallel to the substrate surface. This opens up possibilities for synthesizing nano-junctions amongst wires which is important for the grid architecture of nanoelectronics proposed by Likharev[3]. Even bulk synthesis of SiNW is feasible using sacrificial substrates such as CaCO(3) that can be dissolved post-synthesis. Furthermore, by dissolving appropriate dopants in liquid diphenylsilane, a controlled doping of the nanowires is realized without the use of toxic gases and expensive mass flow controllers. Upon boron doping, we observe a characteristic red shift in photoluminescence spectra. In summary, an inexpensive and versatile method for SiNW is presented that makes these exotic materials available to any lab at low cost.

摘要

一维纳米结构,如硅纳米线(SiNW),是包括传感器在内的低功率密度电子和光电器件的有吸引力的候选材料。本文展示了一种新的简单的硅纳米线批量合成方法[1,2],该方法成本低廉且使用低毒性材料,从而提供了一种安全、节能且绿色的途径。该方法使用低易燃性液体苯基硅烷,与使用硅烷气体相比,为硅纳米线的生长提供了更安全的途径。一种新颖的双室玻璃容器用于创建低压环境,在该环境中,硅纳米线通过气-液-固机制使用金纳米颗粒作为催化剂生长。催化剂分解二苯基硅烷和三苯基硅烷的硅前驱体蒸汽,并沉淀出单晶硅纳米线,这些硅纳米线似乎与衬底表面平行生长。这为在纳米线之间合成纳米结开辟了可能性,这对于利哈列夫[3]提出的纳米电子学网格架构很重要。甚至使用诸如CaCO(3)之类的牺牲衬底进行硅纳米线的批量合成也是可行的,这种衬底在合成后可以溶解。此外,通过在液体二苯基硅烷中溶解适当的掺杂剂,可以在不使用有毒气体和昂贵的质量流量控制器的情况下实现对纳米线的可控掺杂。硼掺杂后,我们在光致发光光谱中观察到特征性的红移。总之,本文提出了一种廉价且通用的硅纳米线方法,该方法使这些奇特的材料能够以低成本提供给任何实验室。

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引用本文的文献

1
Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography.利用牺牲性纳米颗粒消除电子束光刻制造的接触孔中的散粒噪声影响。
J Vis Exp. 2017 Feb 12(120):54551. doi: 10.3791/54551.

本文引用的文献

1
Towards p-type conductivity in SnO2 nanocrystals through Li doping.通过 Li 掺杂实现 SnO2 纳米晶的 p 型导电性。
Nanotechnology. 2010 Jan 22;21(3):035708. doi: 10.1088/0957-4484/21/3/035708.
2
Label-free biosensing of a gene mutation using a silicon nanowire field-effect transistor.利用硅纳米线场效应晶体管进行无标记基因突变生物传感。
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Dopant profiling and surface analysis of silicon nanowires using capacitance-voltage measurements.利用电容 - 电压测量对硅纳米线进行掺杂剂分布分析和表面分析。
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5
Silicon nanowire-based solar cells on glass: synthesis, optical properties, and cell parameters.玻璃上基于硅纳米线的太阳能电池:合成、光学性质及电池参数。
Nano Lett. 2009 Apr;9(4):1549-54. doi: 10.1021/nl803641f.
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Solution-liquid-solid (SLS) growth of silicon nanowires.硅纳米线的溶液-液体-固体(SLS)生长法。
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9
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Nature. 2007 Oct 18;449(7164):885-9. doi: 10.1038/nature06181.
10
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Nano Lett. 2007 Nov;7(11):3249-52. doi: 10.1021/nl071018b. Epub 2007 Oct 10.