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通过离子诱导聚焦掩模对纳米粒子进行高分辨率、平行图案化。

High-resolution, parallel patterning of nanoparticles via an ion-induced focusing mask.

机构信息

National CRI Center for Nano Particle Control, Institute of Advanced Machinery and Design, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-742, Korea.

出版信息

Small. 2010 Oct 4;6(19):2146-52. doi: 10.1002/smll.201000892.

DOI:10.1002/smll.201000892
PMID:20715075
Abstract

An ion-induced focusing mask under the simultaneous injection of ions and charged aerosols generates invisible electrostatic lenses around each opening, through which charged nanoparticles are convergently guided without depositing on the mask surface. The sizes of the created features become significantly smaller than those of the mask openings due to the focusing capability. It is not only demonstrated that material-independent nanoparticles including proteins can be patterned as an ordered array on any surface regardless of the conductive, nonconductive, or flexible nature of the substrate, but also that the array density can be increased. Highly sensitive gas sensors based on these focused nanoparticle patterns are fabricated via the concept.

摘要

在同时注入离子和带电气溶胶的情况下,离子感应聚焦掩模在每个开口周围产生不可见的静电透镜,带电荷的纳米颗粒通过这些透镜被会聚引导,而不会沉积在掩模表面上。由于聚焦能力,所产生的特征尺寸明显小于掩模开口的尺寸。不仅证明了包括蛋白质在内的与材料无关的纳米颗粒可以被图案化为任何表面上的有序阵列,而与基底的导电性、非导电性或柔性无关,而且还可以增加阵列密度。通过该概念,制造了基于这些聚焦纳米颗粒图案的高灵敏度气体传感器。

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