Lochbihler H, Predehl P
Appl Opt. 1992 Mar 1;31(7):964-71. doi: 10.1364/AO.31.000964.
Self-supporting transmission gratings with periods of 1 microm or below are used in combination with grazing-incidence telescopes in celestial x-ray astronomy. They can be produced with sizes up to only a few cm(2); therefore, several hundreds or even thousands of individual elements are needed in order to cover the aperture of a telescope. This large number leads to the problem of characterization of the gratings regarding their x-ray performance. We demonstrate that spectrometry in the resonance domain using H polarization is a suitable method for the determination of the grating wire profile and deviations of the grating surface from a plane. Although developed originally for microwave applications it can be shown that the methods of strict solution of the Helmholtz equation are able to explain even small effects related to imperfections of periodic submicrometer structures.
周期为1微米或更小的自支撑透射光栅与掠入射望远镜结合用于天体X射线天文学。它们的尺寸最大只能达到几平方厘米；因此，为了覆盖望远镜的孔径，需要数百甚至数千个单独的元件。如此大量的元件导致了光栅X射线性能表征的问题。我们证明，在共振域使用H偏振进行光谱分析是确定光栅线轮廓和光栅表面相对于平面的偏差的合适方法。尽管最初是为微波应用开发的，但可以证明，严格求解亥姆霍兹方程的方法甚至能够解释与周期性亚微米结构缺陷相关的微小效应。
