Institute of Automation & Electrometry, Academy of Sciences, 1, Universitetsky pr., Novosibirsk, 630090, Russia.
J Xray Sci Technol. 1997 Jan 1;7(1):71-85. doi: 10.3233/XST-1997-7106.
A new approach to numerical studies of lamellar multilayer gratings is developed. It stands out against the existing modal and differential methods by its applicability to thick multilayer gratings with a small grating period, and also to the case of grazing incidence of radiation. The diffraction properties of multilayer gratings are calculated for x rays with the angles of incidence down to zero. Reflection curves are calculated for multilayer gratings with the grating periods down to 5 nm and the number of bilayers up to 1000. The diffraction pictures are developed for all the range of x-ray radiation (soft and hard x rays). It is directly demonstrated that the multilayer grating can be regarded as a two-dimensional crystal. Numerical calculations based on the newly proposed method were used for the interpretation of experimental data on the performance of the Ni/C multiplayer grating.
提出了一种计算层状多层光栅的新方法。与现有的模态和微分方法相比，该方法的适用性更强，可用于小周期多层光栅，也可用于掠入射辐射的情况。计算了 x 射线以接近零的入射角入射时多层光栅的衍射特性。计算了光栅周期低至 5nm 和双层数高达 1000 的多层光栅的反射曲线。开发了所有 x 射线辐射（软 x 射线和硬 x 射线）的衍射图。直接证明了多层光栅可以看作是二维晶体。基于新提出的方法的数值计算用于解释 Ni/C 多层光栅性能的实验数据。
