Rastani K, Hubbard W M
Appl Opt. 1992 Aug 10;31(23):4863-70. doi: 10.1364/AO.31.004863.
The use of diffraction gratings to trap optical beams in substrates for optical interconnect applications has been proposed by many. We analyze the alignment and fabrication tolerances of such gratings to make them viable for such applications. The use of chirped circular gratings is proposed as a means of compensating for transverse-optical beam misalignments. Fabrication of 1-, 2-, and 4-microm-period gratings on glass substrates through ion-beam milling and their analysis are presented. High diffracted orders were confined to the substrates through total internal reflection.
许多人已提出使用衍射光栅将光束捕获在用于光互连应用的衬底中。我们分析了此类光栅的对准和制造公差，以使它们适用于此类应用。提出使用啁啾圆形光栅作为补偿横向光束未对准的一种方法。介绍了通过离子束铣削在玻璃衬底上制造1微米、2微米和4微米周期的光栅及其分析。通过全内反射，高衍射级被限制在衬底中。
