Wu Shun-Der, Gaylord Thomas K, Glytsis Elias N, Wu Yu-Ming
School of Electrical and Computer Engineering, Microelectronics Research Center, Georgia Institute of Technology, Atlanta 30332, USA.
Appl Opt. 2005 Jul 20;44(21):4447-53. doi: 10.1364/ao.44.004447.
The angular sensitivities of slanted volume gratings (VGs) illuminated by three-dimensional (3-D) converging-diverging spherical Gaussian beams for substrate-mode optical interconnects in microelectronics are analyzed by application of 3-D finite-beam rigorous coupled-wave analysis. Angular misalignments about the z, y, and x axes that correspond to yaw, pitch, and roll misalignments resulting from manufacturing tolerances of chips are investigated. Two cases of linear polarization of the central beam of the Gaussian are considered: E perpendicular K and H perpendicular K, where K is the grating vector. From worst-case manufacturing tolerances, the ranges of yaw, pitch, and roll misalignment angles are alpha = +/-1.17 degrees, beta= +/-3.04 degrees, and gamma = +/-3.04 degrees, respectively. Based on these ranges of misalignment angles, the decreases of diffraction efficiencies for slanted VGs that are due to both the yaw and the roll misalignments are relatively small. However, the efficiency of substrate-mode optical interconnects achieved by slanted VGs could be reduced by 61.04% for E perpendicular K polarization and by 58.63% for H perpendicular K polarization because of the pitch misalignment. Thus the performance of a VG optical interconnect is most sensitive to pitch misalignment.
通过应用三维有限光束严格耦合波分析，研究了用于微电子中衬底模式光学互连的三维会聚-发散球面高斯光束照射下倾斜体光栅（VG）的角度灵敏度。研究了与芯片制造公差导致的偏航、俯仰和滚动失调相对应的绕z、y和x轴的角度失调。考虑了高斯中心光束的两种线偏振情况：E垂直于K和H垂直于K，其中K是光栅矢量。从最坏情况的制造公差来看，偏航、俯仰和滚动失调角的范围分别为α = ±1.17度、β = ±3.04度和γ = ±3.04度。基于这些失调角范围，由于偏航和滚动失调导致的倾斜VG衍射效率的降低相对较小。然而，由于俯仰失调，对于E垂直于K偏振，倾斜VG实现的衬底模式光学互连效率可降低61.04%，对于H垂直于K偏振可降低58.63%。因此，VG光学互连的性能对俯仰失调最为敏感。
