离子束溅射形成的梯度折射率微透镜。
Gradient-index microlens formed by ion-beam sputtering.
作者信息
Shimada J, Ohguchi O, Sawada R
出版信息
Appl Opt. 1992 Sep 1;31(25):5230-6. doi: 10.1364/AO.31.005230.
This paper describes the fabrication and characteristics of a gradient-index microlens by using a low-stress, high-transmittance film that is deposited by ion-beam sputtering. The key techniques in forming this film are sputtering with N(2) gas, performing ion-beam irradiation during deposition, and stabilizing the deposition acceleration current. An integrated device consisting of the microlens and a laser diode is demonstrated. The focusing spot size is 2 microm x 3 microm at a distance of 11 microm from the lens facet.
本文描述了一种利用离子束溅射沉积的低应力、高透射率薄膜制造的梯度折射率微透镜及其特性。形成该薄膜的关键技术是用氮气进行溅射、在沉积过程中进行离子束辐照以及稳定沉积加速电流。展示了一种由微透镜和激光二极管组成的集成器件。在距透镜小面11微米的距离处，聚焦光斑尺寸为2微米×3微米。
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