Yu Bang-Ying, Chen Ying-Yu, Wang Wei-Ben, Hsu Mao-Feng, Tsai Shu-Ping, Lin Wei-Chun, Lin Yu-Chin, Jou Jwo-Huei, Chu Chih-Wei, Shyue Jing-Jong
Research Center for Applied Sciences, Academia Sinica, Taipei 115, Taiwan, Republic of China.
Anal Chem. 2008 May 1;80(9):3412-5. doi: 10.1021/ac702626n. Epub 2008 Mar 21.
By sputtering organic films with 10 kV, 10 nA C60+ and 0.2 kV, 300 nA Ar+ ion beams concurrently and analyzing the newly exposed surface with X-ray photoelectron spectroscopy, organic thin-film devices including an organic light-emitting diode and a polymer solar cell with an inverted structure are profiled. The chemical composition and the structure of each layer are preserved and clearly observable. Although C60+ sputtering is proven to be useful for analyzing organic thin-films, thick organic-devices cannot be profiled without the low-energy Ar+ beam co-sputtering due to the nonconstant sputtering rate of the C60+ beam. Various combinations of ion-beam doses are studied in this research. It is found that a high dosage of the Ar+ beam interferes with the C60+ ion beam, and the sputtering rate decreases with increasing the total ion current. The results suggest that the low-energy single-atom projectile can disrupt the atom deposition from the cluster ion beams and greatly extend the application of the cluster ion-sputtering. By achievement of a steady sputtering rate while minimizing the damage accumulation, this research paves the way to profiling soft matter and organic electronics.
通过同时用10 kV、10 nA的C60+离子束和0.2 kV、300 nA的Ar+离子束溅射有机薄膜，并利用X射线光电子能谱分析新暴露的表面，对包括有机发光二极管和具有倒置结构的聚合物太阳能电池在内的有机薄膜器件进行了剖析。各层的化学成分和结构得以保留且清晰可辨。尽管已证明C60+溅射有助于分析有机薄膜，但由于C60+束的溅射速率不恒定，在没有低能Ar+束共溅射的情况下，无法对厚的有机器件进行剖析。本研究对离子束剂量的各种组合进行了研究。发现高剂量的Ar+束会干扰C60+离子束，且溅射速率随总离子电流的增加而降低。结果表明，低能单原子射弹可扰乱簇离子束的原子沉积，并极大地扩展簇离子溅射的应用。通过在最小化损伤积累的同时实现稳定的溅射速率，本研究为剖析软物质和有机电子学铺平了道路。
