Graduate school of Engineering, Tohoku University, Aoba-ku, Sendai, Japan.
Nanotechnology. 2010 Oct 8;21(40):405502. doi: 10.1088/0957-4484/21/40/405502. Epub 2010 Sep 10.
This paper reports on the design, fabrication and characterization of cantilever-shaped quartz-crystal resonators for scanning probe microscopy (SPM) in order to operate under various environments, especially in liquids for biological applications. The cantilevers have functions of self-sensing and self-actuation using piezoelectric effects, and these properties are demonstrated experimentally. Compared to conventional SPM cantilevers, this quartz cantilever is easy to utilize as a SPM based force sensor in liquids because the self-actuating properties can lead to no spurious resonant peaks. In addition, the self-sensing properties will enable its use even in an opaque liquid and can simplify the SPM system. In this research, quartz cantilevers are fabricated on silicon using a silicon-quartz direct bonding technique, and the sharp silicon tip is integrated at the end of the cantilever as well. Additionally, the electrical Q-enhancement (active Q-control) was tested.
本文报告了用于扫描探针显微镜（SPM）的悬臂式石英晶体谐振器的设计、制造和特性，以便在各种环境下运行，特别是在生物应用的液体中。这些悬臂具有利用压电效应进行自感知和自激励的功能，并通过实验证明了这些特性。与传统的 SPM 悬臂相比，由于自激励特性不会导致虚假的谐振峰，因此这种石英悬臂更容易在液体中用作基于 SPM 的力传感器。此外，自感知特性将使其即使在不透明的液体中也能使用，并简化 SPM 系统。在这项研究中，使用硅-石英直接键合技术在硅片上制造了石英悬臂，并且在悬臂的末端也集成了尖锐的硅尖端。此外，还测试了电 Q 增强（主动 Q 控制）。
