Schürmann G, Noell W, Staufer U, de Rooij N F, Eckert R, Freyland J M, Heinzelmann H
Appl Opt. 2001 Oct 1;40(28):5040-5. doi: 10.1364/ao.40.005040.
A cantilever-based probe is introduced for use in scanning near-field optical microscopy (SNOM) combined with scanning atomic-force microscopy (AFM). The probes consist of silicon cantilevers with integrated 25-mum-high fused-silica tips. The probes are batch fabricated by microfabrication technology. Transmission electron microscopy reveals that the transparent quartz tips are completely covered with an opaque aluminum layer before the SNOM measurement. Static and dynamic AFM imaging was performed. SNOM imaging in transmission mode of single fluorescent molecules shows an optical resolution better than 32 nm.
介绍了一种基于悬臂的探针，用于与扫描原子力显微镜（AFM）相结合的扫描近场光学显微镜（SNOM）。这些探针由集成了25微米高熔融石英尖端的硅悬臂组成。探针通过微加工技术批量制造。透射电子显微镜显示，在SNOM测量之前，透明石英尖端完全覆盖有不透明的铝层。进行了静态和动态AFM成像。单荧光分子透射模式下的SNOM成像显示光学分辨率优于32纳米。
