Costa M F, Almeida J B
Appl Opt. 1993 Sep 1;32(25):4860-3. doi: 10.1364/AO.32.004860.
In this paper we describe a method of noncontact optical microtopography based on discrete triangulation. We show that a light beam with an oblique incidence on a surface can be used to assess the distance of the latter to a reference plane if the bright spot produced on the surface is imaged onto an array of detectors that tracks its lateral displacement. The light beam is swept over the surface so that large areas can be scanned. The authors have used their system with success for the topographic inspection of several surfaces, e.g., thin copper and silver films, polyethylene rough films and molds, graphite, machined metallic parts, and fabrics.
在本文中，我们描述了一种基于离散三角测量的非接触式光学微观形貌测量方法。我们表明，如果表面上产生的亮点成像到跟踪其横向位移的探测器阵列上，那么以倾斜角度入射到表面的光束可用于评估该表面到参考平面的距离。光束扫过表面，从而能够扫描大面积区域。作者已成功地将他们的系统用于多个表面的形貌检测，例如薄铜膜和银膜、聚乙烯粗糙薄膜和模具、石墨、机械加工的金属部件以及织物。
