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使用Nd:YVO4激光在钠钙玻璃上制造微透镜阵列的激光直写技术。

Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd:YVO4 laser.

作者信息

Nieto Daniel, Flores-Arias M Teresa, O'Connor Gerard M, Gomez-Reino Carlos

机构信息

Grupo de Microoptica y Optica (GRIN), Unidad Asociada al Instituto de Ciencia de Materiales de Aragón, CSIC, Zaragoza, Spain.

出版信息

Appl Opt. 2010 Sep 10;49(26):4979-83. doi: 10.1364/AO.49.004979.

Abstract

A one-step direct-write technique for fabricating spherical microlenses on soda-lime glass substrates is described. Using a Q switched Nd:YVO(4) laser combined with a galvanometer system, square and triangular microlens arrays were fabricated. The focal length of microlenses is measured using direct and nondirect methods. Values around 118 and 125 µm were obtained for the microlens focal length of square and triangular arrays, respectively. A noncontact profilometer is used for determining the surface roughness of square and triangular arrays. Results are compared with that of glass substrate.

摘要

描述了一种在钠钙玻璃基板上制造球形微透镜的一步直写技术。使用调Q Nd:YVO₄激光器与振镜系统相结合,制造了方形和三角形微透镜阵列。使用直接和非直接方法测量微透镜的焦距。方形和三角形阵列的微透镜焦距分别获得了约118和125 µm的值。使用非接触轮廓仪确定方形和三角形阵列的表面粗糙度。将结果与玻璃基板的结果进行比较。

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