Wakaki M, Komachi Y, Kanai G
Appl Opt. 1998 Feb 1;37(4):627-31. doi: 10.1364/ao.37.000627.
Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO(2) laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO(2) laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a light source. The focused spot FWHM diameter of 1.35 mum was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized.
通过使用二氧化碳激光，微透镜和微透镜阵列直接形成在玻璃板表面上。当使用聚焦的二氧化碳激光束将玻璃板表面局部加热到玻璃材料的工作点时，由于表面张力它倾向于变成双曲面，这就形成了一个微透镜。使用一种利用特殊设计的原子力显微镜的超高精度三维轮廓仪（型号UA3P，松下电器产业株式会社）测量微透镜的轮廓。使用以氦氖激光作为光源的显微镜和电荷耦合器件系统测量微透镜焦点处的强度分布和光斑直径。获得了1.35微米的聚焦光斑半高宽直径，并从光斑轮廓推导出调制传递函数。还制造并表征了微透镜阵列。
