Department of Electronic Systems Engineering School of Engineering, University of Shiga Prefecture, Hassaka-cho, Hikone, Shiga, 522-8533, Japan.
Opt Lett. 2010 Sep 15;35(18):3111-3. doi: 10.1364/OL.35.003111.
Using two-beam interference lithography and dry etching, we fabricated a mid-IR wire-grid polarizer consisting of a 350 nm pitch WSi grating on an Y(2)O(3) ceramic substrate, which has wider transparency than sapphire. The transmittance of TM polarization was greater than 70% in the 3-7 μm wavelength range without antireflection films, and the extinction ratio was over 20 dB in the 2.5-5 μm wavelength range. The wire-grid polarizer with the Y(2)O(3) ceramic substrate provides high durability and good IR transparency.
我们采用双光束干涉光刻和干法刻蚀技术，在 Y(2)O(3)陶瓷衬底上制作了一个中红外金属网格偏振器，其光栅周期为 350nm，与蓝宝石相比，这种衬底的透光率更宽。在没有抗反射膜的情况下，TM 偏振的透过率在 3-7μm 波长范围内大于 70%，在 2.5-5μm 波长范围内消光比大于 20dB。采用 Y(2)O(3)陶瓷衬底的金属网格偏振器具有高耐久性和良好的红外透光率。
