光刻、电铸和塑料成型形成的三维微光学元件的应用。

Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding.

作者信息

Brenner K H, Kufner M, Kufner S, Moisel J, Müller A, Sinzinger S, Testorf M, Göttert J, Mohr J

出版信息

Appl Opt. 1993 Nov 10;32(32):6464-9. doi: 10.1364/AO.32.006464.

DOI:10.1364/AO.32.006464

PMID:20856485

Abstract

Micro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a lithography, electroforming, and plastic molding process in which poly(methyl methacrylate) is structured by high-energy synchrotron radiation. We demonstrate an experimental system of image formation that uses microprisms and microlenses for a threedimensional microintegration of optical components.

摘要

微光学通常与平面波导或集成光学电路相关联。在这种情况下，光的传播被限制在一维或二维，而光传播的三维特性被忽略。我们提出了一种通过所谓的LIGA工艺制造三维微光学元件的方法，LIGA工艺是一种光刻、电铸和塑料成型工艺，其中聚甲基丙烯酸甲酯通过高能同步辐射进行结构化。我们展示了一个成像实验系统，该系统使用微棱镜和微透镜实现光学元件的三维微集成。