Bohling Michael, Seiler Thomas, Wdowiak Boguslaw, Jahns Jürgen, Mohr Jürgen, Börner Martin
University of Hagen, Chair of Micro- and Nanophotonics, Universitätsstr. 27, D-58097 Hagen, Germany.
Appl Opt. 2012 Sep 1;51(25):5989-95. doi: 10.1364/AO.51.005989.
We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is 1 mm×10 mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to apply it to the implementation of a transversal filter for femtosecond pulses. We present a theoretical description of the performance of the retroreflector array as a filtering device and show experimental results.
我们报道了一种节距为100μm的一维微反射镜阵列的制造。该阵列通过X射线光刻以及光刻、电镀和成型（LIGA）工艺在1mm厚的聚甲基丙烯酸甲酯（PMMA）层中制造，随后覆盖金。阵列面积为1mm×10mm。基于LIGA的制造工艺的高精度使得该元件能够用于光谱仪中。在此，建议将其应用于飞秒脉冲横向滤波器的实现。我们给出了反射镜阵列作为滤波装置性能的理论描述，并展示了实验结果。
