Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia.
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Sep;57(9):2042-50. doi: 10.1109/TUFFC.2010.1652.
The paper studies, by the finite element method, the reflection of surface acoustic waves from single obstacles of regular shapes on the surface of piezoelectric materials. The so-called perfectly matched layer is used to truncate the computational domain. The following types of imperfections are considered: single steps, grooves, and projections, as well as metallic strips overlaying the substrate or inset into it. The absolute values and the phases of the reflection coefficients are computed for YZ and 128°YX LiNbO3 substrates as functions of the height-to-wavelength and the width-to-wavelength ratios. In addition, the reflectivity of gratings comprising a finite number of grooves or electrodes is computed and compared with the analytic estimations based on the coupling-of-modes theory.
本文采用有限元法研究了在压电材料表面上具有规则形状的单个障碍物对表面声波的反射。所谓的完全匹配层用于截断计算域。考虑了以下类型的不完美：单台阶、凹槽和凸起，以及覆盖或嵌入衬底的金属条。计算了 YZ 和 128°YX LiNbO3 衬底的反射系数的绝对值和相位作为高度与波长以及宽度与波长比的函数。此外，计算了由有限数量的凹槽或电极组成的光栅的反射率，并与基于模耦合理论的分析估计进行了比较。
