School of Information Science and Technology, Hangzhou Normal University, Hangzhou 311121, China.
Sensors (Basel). 2023 Jan 1;23(1):464. doi: 10.3390/s23010464.
This paper presents a 60 MHz surface acoustic wave (SAW) yarn tension sensor incorporating a novel SAW oscillator with high-frequency stability. A SAW delay line was fabricated on ST-X quartz substrate using the unbalanced-split electrode and bi-directional engraving slots. The dual differential channel delay linear acoustic surface wave oscillator is designed and implemented to test yarn tension, which can effectively remove the interference of temperature, humidity, and other peripheral factors through differential design. The yarn tension sensor using the surface acoustic wave has high-precision characteristics, and the SAW delay line oscillator is designed to ensure the test system’s stable operation. The effect of time and tension on oscillator frequency stability is studied in detail, and the single oscillator and the dual differential channel system were tested, respectively. After using the dual differential channel system, the short-term frequency stability from is reduced from 1.0163 ppm to 0.17726 ppm, the frequency accuracy of the tension sensor is improved from 134 Hz to 27 Hz, and the max frequency jump steady is reduced from 2.2395 ppm to 0.45123 ppm.
本文提出了一种 60MHz 的声表面波(SAW)纱线张力传感器,该传感器采用具有高频稳定性的新型 SAW 振荡器。在 ST-X 石英衬底上使用非平衡分裂电极和双向刻蚀槽制造了 SAW 延迟线。设计并实现了双差分通道延迟线性声表面波振荡器来测试纱线张力,通过差分设计可以有效地消除温度、湿度和其他外围因素的干扰。使用表面声波的纱线张力传感器具有高精度的特点,并且设计了 SAW 延迟线振荡器以确保测试系统的稳定运行。详细研究了时间和张力对振荡器频率稳定性的影响,并分别测试了单个振荡器和双差分通道系统。使用双差分通道系统后,短期频率稳定性从 1.0163ppm 降低到 0.17726ppm,张力传感器的频率精度从 134Hz 提高到 27Hz,最大频率跳变稳定度从 2.2395ppm 降低到 0.45123ppm。