Spherical aberration correction using a liquid-crystal spatial-light modulator in off-axis electron holography.

One can correct spherical aberration in a transmission electron microscope by using a newly developed aberration-correction method involving off-axis electron holography. In this method, a liquid-crystal spatial-light modulator (LC SLM) is employed during the holographic reconstruction step to compensate for spherical aberration. Application of this method to high-resolution off-axis electron holograms of fine gold particles is presented. The phase distribution of the corrected object wave is visualized by the Zernike phase-contrast method carried out with the same LC SLM.