Wu Q, Hodgkinson I J
Appl Opt. 1994 Dec 1;33(34):8109-10. doi: 10.1364/AO.33.008109.
We discuss recent developments in methods for monitoring the anisotropic growth and properties of tilted columnar films and present results for the perpendicular incidence birefringence of aluminum oxide, Merck Substance Hi, silicon oxide, tantalum oxide, titanium oxide, and zirconium oxide.