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采用紧聚焦飞秒激光涡旋脉冲进行材料加工。

Materials processing with a tightly focused femtosecond laser vortex pulse.

机构信息

Laser Physics Centre, Research School of Physics and Engineering, The Australian National University,Canberra Australian Capital Territory 0200, Australia.

出版信息

Opt Lett. 2010 Oct 15;35(20):3417-9. doi: 10.1364/OL.35.003417.

Abstract

In this Letter we present the first (to our knowledge) demonstration of material modification using tightly focused single femtosecond laser vortex pulses. Double-charge femtosecond vortices were synthesized with a polarization-singularity beam converter based on light propagation in a uniaxial anisotropic medium and then focused using moderate- and high-NA optics (viz., NA=0.45 and 0.9) to ablate fused silica and soda-lime glass. By controlling the pulse energy, we consistently machine micrometer-size ring-shaped structures with <100nm uniform groove thickness.

摘要

在这封信件中,我们首次(据我们所知)展示了使用聚焦紧密的单飞秒激光涡旋脉冲进行材料修饰的成果。我们使用基于单轴各向异性介质中光传播的偏振奇点光束转换器合成了双电荷飞秒涡旋,并使用中等和高数值孔径(即,NA=0.45 和 0.9)的光学器件进行聚焦,以烧蚀熔融石英和钠钙玻璃。通过控制脉冲能量,我们始终能够加工出具有<100nm 均匀槽厚的微米级环形结构。

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