IMM-Instituto de Microelectrónica de Madrid (CNM-CSIC), Madrid, Spain.
Nanotechnology. 2010 Nov 19;21(46):465502. doi: 10.1088/0957-4484/21/46/465502. Epub 2010 Oct 25.
Standard spring constant calibration methods are compared when applied to higher eigenmodes of cantilevers used in dynamic atomic force microscopy (dAFM). Analysis shows that Sader's original method (Sader et al 1999 Rev. Sci. Instrum. 70 3967-9), which relies on a priori knowledge of the eigenmode shape, is poorly suited for the calibration of higher eigenmodes. On the other hand, the thermal noise method (Hutter and Bechhoefer 1993 Rev. Sci. Instrum. 64 1868-73) does not require knowledge of the eigenmode and remains valid for higher eigenmodes of the dAFM probe. Experimental measurements of thermal vibrations in air for three representative cantilevers are provided to support the theoretical results.
当应用于动态原子力显微镜（dAFM）中使用的悬臂梁的较高本征模式时，比较了标准弹性常数校准方法。分析表明，Sader 的原始方法（Sader 等人，1999 年，Rev. Sci. Instrum. 70 3967-9），依赖于本征模式形状的先验知识，不太适合更高本征模式的校准。另一方面，热噪声法（Hutter 和 Bechhoefer，1993 年，Rev. Sci. Instrum. 64 1868-73）不需要本征模式的知识，并且对于 dAFM 探针的更高本征模式仍然有效。提供了三个代表性悬臂梁在空气中的热振动的实验测量结果，以支持理论结果。
