基于离轴石英增强光声光谱的痕量气体检测：优化与性能评估

Trace gas detection based on off-beam quartz enhanced photoacoustic spectroscopy: optimization and performance evaluation.

作者信息

Liu Kun, Yi Hongming, Kosterev Anatoliy A, Chen Weidong, Dong Lei, Wang Lei, Tan Tu, Zhang Weijun, Tittel Frank K, Gao Xiaoming

机构信息

Environmental Spectroscopy Laboratory, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei, 230031, People's Republic of China.

出版信息

Rev Sci Instrum. 2010 Oct;81(10):103103. doi: 10.1063/1.3480553.

DOI:10.1063/1.3480553

PMID:21034071

Abstract

A gas sensor based on off-beam quartz enhanced photoacoustic spectroscopy was developed and optimized. Specifically, the length and diameter of the microresonator tube were optimized, and the outer tube shape is modified for enhancing the trace gas detection sensitivity. The impact of the distance between the quartz tuning fork and an acoustic microresonator on the sensor performance was experimentally investigated. The sensor performance was evaluated by determining the detection sensitivity to H(2)O vapor in ambient air at normal atmospheric pressure. A normalized noise equivalent absorption coefficient (1σ) of 6.2×10(-9) cm(-1) W/Hz(1/2) was achieved.

摘要

开发并优化了一种基于离轴石英增强光声光谱的气体传感器。具体而言，对微谐振器管的长度和直径进行了优化，并对外部管形状进行了修改，以提高痕量气体检测灵敏度。通过实验研究了石英音叉与声学微谐振器之间的距离对传感器性能的影响。通过测定常压下环境空气中对H₂O蒸汽的检测灵敏度来评估传感器性能。实现了6.2×10⁻⁹ cm⁻¹ W/Hz¹/²的归一化噪声等效吸收系数（1σ）。