通过垂直致动器的电荷线性化实现定量扫描探针显微镜形貌测量。
Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator.
作者信息
Fleming Andrew J
机构信息
School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, New South Wales 2308, Australia.
出版信息
Rev Sci Instrum. 2010 Oct;81(10):103701. doi: 10.1063/1.3488359.
Many forms of scanning probe microscopy require a piezoelectric actuator to vary the probe-sample distance. Examples include constant-force atomic force microscopy and constant-current scanning tunneling microscopy. In such modes, the topography of the sample is reconstructed from the voltage applied to the vertical piezoelectric actuator. However, piezoelectric actuators exhibit significant hysteresis which can produce up to 14% uncertainty in the reproduced topography. In this work, a charge drive is used to linearize the vertical piezoelectric actuator which reduces the error from 14% to 0.65%.
许多形式的扫描探针显微镜需要一个压电致动器来改变探针与样品之间的距离。例子包括恒力原子力显微镜和恒流扫描隧道显微镜。在这种模式下，样品的形貌是根据施加到垂直压电致动器上的电压重建的。然而，压电致动器表现出显著的滞后现象，这可能在再现的形貌中产生高达14%的不确定性。在这项工作中，使用电荷驱动使垂直压电致动器线性化，从而将误差从14%降低到0.65%。
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