一种用于降低压电叠层致动器滞后的创新型数字电荷放大器的实现与分析。

Implementation and analysis of an innovative digital charge amplifier for hysteresis reduction in piezoelectric stack actuators.

作者信息

Bazghaleh Mohsen, Grainger Steven, Cazzolato Ben, Lu Tien-Fu, Oskouei Reza

机构信息

School of Mechanical Engineering, The University of Adelaide, North Terrace, South Australia 5005, Australia.

School of Computer Science, Engineering and Mathematics, Flinders University, Bedford Park, South Australia 5042, Australia.

出版信息

Rev Sci Instrum. 2014 Apr;85(4):045005. doi: 10.1063/1.4871295.

DOI:10.1063/1.4871295

PMID:24784651

Abstract

Smart actuators are the key components in a variety of nanopositioning applications, such as scanning probe microscopes and atomic force microscopes. Piezoelectric actuators are the most common smart actuators due to their high resolution, low power consumption, and wide operating frequency but they suffer hysteresis which affects linearity. In this paper, an innovative digital charge amplifier is presented to reduce hysteresis in piezoelectric stack actuators. Compared to traditional analog charge drives, experimental results show that the piezoelectric stack actuator driven by the digital charge amplifier has less hysteresis. It is also shown that the voltage drop of the digital charge amplifier is significantly less than the voltage drop of conventional analog charge amplifiers.

摘要

智能致动器是各种纳米定位应用中的关键部件，如扫描探针显微镜和原子力显微镜。压电致动器因其高分辨率、低功耗和宽工作频率而成为最常见的智能致动器，但它们存在滞后现象，这会影响线性度。本文提出了一种创新的数字电荷放大器，以减少压电叠堆致动器中的滞后现象。与传统的模拟电荷驱动器相比，实验结果表明，由数字电荷放大器驱动的压电叠堆致动器具有更少的滞后现象。还表明，数字电荷放大器的电压降明显小于传统模拟电荷放大器的电压降。