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双模压电单晶超声微致动器。

A double-mode piezoelectric single-crystal ultrasonic micro-actuator.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Nov;57(11):2596-600. doi: 10.1109/TUFFC.2010.1726.

DOI:10.1109/TUFFC.2010.1726
PMID:21041147
Abstract

Ternary Pb(In(1/2)Nb(1/2))O(3)-Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PIN-PMN-PT) single crystals with higher coercive field (E(C) ~9 kV/cm) and higher ferroelectric-transition temperature (T(R-T) = 108°C) were grown, and correspondingly, a double-mode piezoelectric ultrasonic micro-actuator made of PIN-PMN-PT crystal brick (5 x 1.5 x 1.32 mm) and operated in the first longitudinal and the second bending modes was developed. The ferroelectric, dielectric, electromechanical, and resonance displacement properties of the micro-actuator were characterized for miniature linear piezo-motor applications. The longitudinal displacement of the actuator is ~0.11 μm (with an applied voltage of 5 V), which is comparable to that of a multilayer piezoelectric-ceramic actuator of the same size. This crystal micro-actuator was successfully used to drive a slider moving linearly.

摘要

具有更高矫顽场 (E(C)~9 kV/cm) 和更高铁电相变温度 (T(R-T) = 108°C) 的三元 Pb(In(1/2)Nb(1/2))O(3)-Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PIN-PMN-PT) 单晶被生长,并且相应地,一种由 PIN-PMN-PT 晶体砖 (5 x 1.5 x 1.32 mm) 制成并在第一纵向和第二弯曲模式下工作的双模压电超声微致动器被开发。该微致动器的铁电、介电、机电和共振位移性能被表征,用于微型线性压电马达应用。该致动器的纵向位移约为 0.11 μm(施加电压为 5 V),与相同尺寸的多层压电陶瓷致动器相当。这种晶体微致动器成功地用于驱动滑块线性运动。

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