Bock J J, Kawada M, Matsuhara H, Richards P L, Lange A E
Appl Opt. 1995 Jul 1;34(19):3651-7. doi: 10.1364/AO.34.003651.
We developed a far-infrared Fabry-Perot filter constructed from a single silicon substrate. The limiting resolving power caused by beam divergence of a silicon-gap Fabry-Perot filter is approximately 10 times higher than that of a vacuum-gap Fabry-Perot filter because of the large index of refraction of silicon. The filter thus permits compact, high-throughput optical systems. Metal mesh patterns microlithographed on each face provide enhanced, wavelength-dependent face reflectivity. We tested the performance of filters with metal mesh patterns consisting of inductive crosses and capacitive squares. A Fabry-Perot filter developed for a rocketborne astrophysics experiment with a capacitive square metal mesh pattern achieves a resolving power of λ/Δλ(FWHM) =160 at λ= 158 µm, with a peak transmittance of 37% over an active aperture of 6.9 mm for an ƒ/3.8 optical beam at 15° incidence. The absorptivity of a 240-µm thick silicon substrate patterned with capacitive metal mesh is A ≲ 1% per pass, including loss in both the silicon and the metal mesh.
我们开发了一种由单个硅基体制成的远红外法布里 - 珀罗滤波器。由于硅的折射率较大，硅间隙法布里 - 珀罗滤波器的光束发散所导致的极限分辨能力比真空间隙法布里 - 珀罗滤波器高约10倍。因此，该滤波器适用于紧凑、高通量的光学系统。在每个面上通过微光刻制作的金属网格图案可提供增强的、与波长相关的面反射率。我们测试了具有由电感交叉和电容方形组成的金属网格图案的滤波器的性能。为火箭搭载天体物理实验开发的具有电容方形金属网格图案的法布里 - 珀罗滤波器，在λ = 158 µm时实现了λ/Δλ（半高宽）= 160的分辨能力，对于15°入射角的ƒ/3.8光束，在6.9 mm的有效孔径上峰值透过率为37%。用电容性金属网格图案化的240 µm厚硅基板的吸收率每通过一次A ≲ 1%，包括硅和金属网格中的损耗。
