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旋转镜进行激光束扫描。I. 镜扫描装置建模

Laser beam scanning by rotary mirrors. I. Modeling mirror-scanning devices.

作者信息

Li Y, Katz J

出版信息

Appl Opt. 1995 Oct 1;34(28):6403-16. doi: 10.1364/AO.34.006403.

DOI:10.1364/AO.34.006403
PMID:21060488
Abstract

Avector approach to tracing the path of a laser beam through an optical system containing movable plane mirrors is described, which permits a unified treatment of a number of basic mirror-scanning devices. We show that the scan field produced by the mirror-scanning system is a curved surface with a straight line as its generating element. The cross section of the scan field can be a circle, an ellipse, or a curve in the shape of an egg. Based on this understanding, some advanced topics are addressed, e.g., the relationship between the scan field and the scan pattern, the dependence of the scan pattern on the location and orientation of the observation surface, optical distortions in a scan pattern, spot-size enlargement caused by non-normal incidence of the scan beam on the observation plane, and so on. Design equations and curves are derived for the mirror-scanning devices that most frequently exist in linear and circular scan technology. Part II contains an analysis of the galvanometer-based optical scanner paddle scanner and the regular polygon. In Part III, X-Y scanning systems are studied.

摘要

描述了一种通过包含可移动平面镜的光学系统追踪激光束路径的矢量方法,该方法允许对许多基本的镜扫描装置进行统一处理。我们表明,镜扫描系统产生的扫描场是一个以直线为生成元素的曲面。扫描场的横截面可以是圆形、椭圆形或卵形曲线。基于这一认识,讨论了一些高级主题,例如扫描场与扫描图案之间的关系、扫描图案对观察表面位置和方向的依赖性、扫描图案中的光学畸变、扫描光束非垂直入射到观察平面上导致的光斑尺寸扩大等等。推导了线性和圆形扫描技术中最常见的镜扫描装置的设计方程和曲线。第二部分包含对基于振镜的光学扫描仪、桨式扫描仪和正多边形的分析。第三部分研究了X-Y扫描系统。

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