扩展光谱区域的光学常数计算：应用于二氧化钛薄膜
Optical-constant calculation over an extended spectral region: application to titanium dioxide film.
作者信息
Chiao S C, Bovard B G, Macleod H A
出版信息
Appl Opt. 1995 Nov 1;34(31):7355-60. doi: 10.1364/AO.34.007355.
PMID:21060609
Abstract
An iterative algorithm has been developed that takes starting values derived by an envelope method but then minimizes the influence of the envelopes and emphasizes the actual measured data. This combination avoids the difficulties inherent in the accurate drawing of the envelopes and makes it possible to extract the thickness and the optical constants of semiconducting and dielectric films over a wide spectral region, including regions of high absorption.
摘要
已经开发出一种迭代算法，该算法采用由包络法得出的初始值，但随后将包络的影响降至最低，并强调实际测量数据。这种结合避免了精确绘制包络时固有的困难，使得能够在包括高吸收区域在内的宽光谱范围内提取半导体和介电薄膜的厚度及光学常数。
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