Holmér A K, Hård S
Appl Opt. 1995 Nov 20;34(33):7718-23. doi: 10.1364/AO.34.007718.
We have used a kinoform to increase the beam-power utilization in an excimer-laser-machining experiment. The kinoform creates the pattern to be machined. Thus less power is wasted on the blocking parts of a shadow mask. To achieve as smooth an intensity profile as possible, the kinoform was also used together with a microlens-array beam homogenizer. We discuss the intensity distributions of the patterns created by the kinoform with and without the beam homogenizer as well as the design of the kinoform and the homogenizer, with emphasis on the relation to the coherence properties of the laser beam.
在准分子激光加工实验中，我们使用了一种相息图来提高光束功率利用率。相息图生成待加工的图案。这样一来，在荫罩的遮挡部分上浪费的功率就减少了。为了尽可能获得平滑的强度分布，相息图还与微透镜阵列光束匀化器一起使用。我们讨论了有无光束匀化器时相息图所生成图案的强度分布，以及相息图和匀化器的设计，重点是与激光束相干特性的关系。
