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带有金属镜的共振腔增强型薄膜AlGaAs/GaAs/AlGaAs发光二极管

Resonant-cavity-enhanced thin-film AlGaAs/GaAs/AlGaAs LED's with metal mirrors.

作者信息

Wilkinson S T, Jokerst N M, Leavitt R P

出版信息

Appl Opt. 1995 Dec 20;34(36):8298-302. doi: 10.1364/AO.34.008298.

Abstract

Resonant-cavity-enhanced light-emitting diodes (RCE LED's) are of increasing interest as a low-cost alternative to lasers for short-distance applications. We report on the characteristics of thin-film AlGaAs/GaAs/AlGaAs double-heterostructure RCE LED's with metal mirrors on both sides fabricated by means of epitaxial liftoff and bonded to silicon host substrates. The devices exhibit typical turn-on voltages of 1.3 V, operating resistances of 31 Ω, linewidths of 10.4 nm, efficiencies of 1.4%, dispersion half-angles of 23.7°, and stable output over more than 1700 h. These devices exhibit significant improvement over conventional LED's without additional complicated processing or growth steps, resulting in a manufacturable, low-cost device.

摘要

共振腔增强型发光二极管(RCE LED)作为短距离应用中激光的低成本替代方案,越来越受到关注。我们报告了通过外延剥离法制造的、两侧带有金属镜的薄膜AlGaAs/GaAs/AlGaAs双异质结构RCE LED的特性,并将其键合到硅主衬底上。这些器件的典型开启电压为1.3 V,工作电阻为31 Ω,线宽为10.4 nm,效率为1.4%,色散半角为23.7°,并且在超过1700小时的时间内输出稳定。与传统LED相比,这些器件无需额外复杂的加工或生长步骤就有显著改进,从而形成了一种可制造的低成本器件。

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