Large arrays of spatial light modulators hybridized to silicon integrated circuits.

Large, high-frame-rate spatial light modulators are key components required for the realization of real-time optical processors. We report a 128 × 128 array of GaAs-based optical modulators that we hybridized to a Si integrated circuit by using In bump bonds to form a spatial light modulator. These optical modulators are composed of a series of quantum wells within an asymmetric Fabry-Perot cavity to control the optical properties. The resulting 128 × 128 element array operates in an intensity-only reflection mode at greater than 100,000 frames per second. This array interfaces to a 486-based personal computer through a standard industry standard architecture bus.