Cui Y, Azzam R M
Appl Opt. 1996 May 1;35(13):2235-8. doi: 10.1364/AO.35.002235.
The normal-incidence rotating-sample ellipsometer is an instrument that can be used to characterize grating surfaces from the measured ratio ρof complex reflection coefficients r(y)/r(x) of light polarized perpendicular and parallel to the grating groove direction. Experimental results at different wavelengths for different gratings with spatial frequencies from 150 to 5880 grooves/mm are presented. The groove depth of the 5880-grooves/mm gold-coated grating can be estimated from the measured ρ and rigorous grating theory.
正入射旋转样品椭圆偏振仪是一种可用于根据所测得的与光栅槽方向垂直和平行偏振的光的复反射系数r(y)/r(x)之比ρ来表征光栅表面的仪器。文中给出了不同空间频率（150至5880条刻线/毫米）的不同光栅在不同波长下的实验结果。通过所测得的ρ和严格的光栅理论，可以估算出5880条刻线/毫米的镀金光栅的槽深。
