Department of Electrical and Computer Engineering, University of Kentucky, Lexington, KY 40506, USA.
Nanotechnology. 2011 Jan 7;22(1):015301. doi: 10.1088/0957-4484/22/1/015301. Epub 2010 Dec 6.
Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors. We study the differences in gold deposited from three different aqueous solutions containing chloroauric acid (HAuCl(4)), sodium tetrachloroaurate (NaAuCl(4)), and the disulfitoaurate complex (Au(SO(3))(2)). We also examine the dependence of threshold dose upon precursor concentration and demonstrate high-resolution patterning with a pitch as small as 50 nm. Finally, we show that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous precursors.
使用体相液体前体制备聚焦电子束诱导沉积（EBID）是一种新颖的纳米制造方法，与气相前体制备的 EBID 相比，其纯度有所提高。本文首次报道了使用体相液体前体制备金的 EBID。我们研究了三种不同的含金水溶液（氯金酸（HAuCl(4)）、四氯金酸钠（NaAuCl(4)）和二硫代金酸配合物(Au(SO(3))(2))）沉积金的差异。我们还考察了前体浓度对阈值剂量的影响，并证明了具有 50nm 甚至更小间距的高分辨率图案化。最后，我们表明与金属有机气相前体制备的沉积物相比，这些液体前体制备的金沉积物的纯度显著提高。
