Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061, United States.
Langmuir. 2011 Jan 18;27(2):800-8. doi: 10.1021/la1038393. Epub 2010 Dec 16.
Focused ion beam patterning is a powerful technique for guiding the growth of ordered hexagonal porous anodic alumina. This study shows that, with the guidance of the focused ion beam patterning, hexagonal porous anodic alumina with interpore distances from 200 to 425 nm can be fabricated at 140 V in 0.3 M phosphoric acid. When the interpore distance is increased to 500 nm, alternating diameter nanopore arrays are synthesized with the creation and growth of new small pores at the junctions of three large neighboring pores. Moreover, alternating diameter nanopore arrays in hexagonal arrangement are fabricated by focused ion beam patterning guided anodization. Interpore distance is an important parameter affecting the arrangement of alternating diameter nanopore arrays. Different types of novel patterns are obtained by designing different focused ion beam concave arrays. The fundamental understanding of the process is discussed.
聚焦离子束图案化是一种引导有序六方多孔阳极氧化铝生长的强大技术。本研究表明，在聚焦离子束图案化的引导下，在 0.3 M 磷酸中于 140 V 下可以制备出孔间距离为 200 至 425nm 的六方多孔阳极氧化铝。当孔间距离增加到 500nm 时，在三个大相邻孔的连接处会形成新的小孔，从而合成交替直径纳米孔阵列。此外，通过聚焦离子束图案化引导的阳极氧化制备出了呈六方排列的交替直径纳米孔阵列。孔间距离是影响交替直径纳米孔阵列排列的重要参数。通过设计不同的聚焦离子束凹面阵列，可以获得不同类型的新型图案。讨论了对该过程的基本理解。
