采用过量分数法校正扫描非线性的波长调谐干涉测量法进行非连续表面测量。

Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity.

作者信息

Hibino Kenichi, Tani Yosuke, Bitou Youichi, Takatsuji Toshiyuki, Warisawa Shinichi, Mitsuishi Mamoru

机构信息

National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba 305-8564, Japan.

出版信息

Appl Opt. 2011 Feb 20;50(6):962-9. doi: 10.1364/AO.50.000962.

DOI:10.1364/AO.50.000962

PMID:21343977

Abstract

Wavelength-tuning interferometry can measure surface shapes with discontinuous steps using a unit of synthetic wavelength that is usually larger than the step height. However, measurement resolution decreases for large step heights since the synthetic wavelength becomes much larger than the source wavelength. The excess fraction method with a piezoelectric transducer phase shifting is applied to two-dimensional surface shape measurements. Systematic errors caused by nonlinearity in source frequency scanning are fully corrected by a correlation analysis between the observed and calculated interference fringes. Experiment results demonstrate that the determination of absolute interference order gives the profile of a surface with a step height of 1 mm with an accuracy of 12 nm.

摘要

波长调谐干涉测量法可以使用通常大于台阶高度的合成波长单位来测量具有不连续台阶的表面形状。然而，对于大台阶高度，测量分辨率会降低，因为合成波长变得比源波长长得多。采用压电换能器相移的多余分数法被应用于二维表面形状测量。通过对观测到的和计算出的干涉条纹进行相关性分析，完全校正了由源频率扫描中的非线性引起的系统误差。实验结果表明，绝对干涉级次的确定给出了台阶高度为1毫米的表面轮廓，精度为12纳米。