Faculty of Engineering, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi-ku, Osaka-shi, Osaka 558-8585, Japan.
J Phys Condens Matter. 2010 Dec 1;22(47):474008. doi: 10.1088/0953-8984/22/47/474008. Epub 2010 Nov 15.
We propose that novel oxide superlattice structures of crystalline TiO(2)/ZnO on sapphire substrates can be used for multilayer mirrors with high reflectivity at 2.734 nm. In the experimental study, both rutile TiO(2)(200) and wurtzite ZnO(001) thin films were grown epitaxially on the same sapphire (001) substrate by atomic layer epitaxy (ALE) at 450 °C. We also demonstrated that the novel oxide superlattice structure of 10-bilayer TiO(2)/ZnO on a sapphire substrate gave a high reflectivity of 29.4% at 2.74 nm.
我们提出，在蓝宝石衬底上的结晶 TiO(2)/ZnO 新型氧化物超晶格结构可用于具有在 2.734nm 处高反射率的多层镜。在实验研究中，金红石 TiO(2)(200)和纤锌矿 ZnO(001)薄膜均通过原子层外延（ALE）在 450°C 下在相同的蓝宝石（001）衬底上外延生长。我们还证明，蓝宝石衬底上的 10 层 TiO(2)/ZnO 新型氧化物超晶格结构在 2.74nm 处的反射率高达 29.4%。
